KTa0.5Nb0.5O3 ferroelectric thin films: processing, characterization and application to microwave agile devices
نویسندگان
چکیده
This paper is aimed at demonstrating the high capabilities of KTa0.5Nb0.5O3 thin films for microwave agility applications. Tunable capacitors, resonators and phase shifters were realized with KTN materials. Their high frequency measurements showed, in particular, the very high tuning factors of these films under quite low electric field. Index Terms Ferroelectrics, Interdigital Capacitors, Phase Shifters, Stub Resonators, Thin Films
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